University of Illinois Physics Professor Paul Kwiat and members of his research group have developed a new tool for precision measurement at the nanometer scale in scenarios where background noise and ...

This image compares data from two Iceye Synthetic Aperture Radar images. Changes in the vertical height of the surface appear black. Areas without changes are depicted in white. Credit: Iceye SAN ...

The current state of the art of embedded motion sensing is based around micro-electromechanical systems (MEMS) devices. These miracles of microfabrication use tiny silicon structures, configured to ...

One of the biggest challenges for nanoscale fabrication is how to measure devices on such a minute scale. As the semiconductor industry demands ever smaller devices, the need for reliable, robust ...

Electronic and computer processors with a higher speed need smaller features for integrated circuits (IC), which also need smoother and smaller substrate surfaces. Chemical mechanical polishing (CMP) ...