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A Ferroelectric BEoL Module: Adding Non-Volatile Memories and Varactors to Existing Technology Nodes
Abstract: In this paper we show the potential of further device functionalization in interconnect layers on established technologies by implementing innovative ferroelectric films based on ...
The main motivation behind building this extension was to improve the IaC workflow at my employer, CMInformatik. The extension therefore contains some features that are specific to our workflow.
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